Plastic Deformation Magnetic Assembly (PDMA) Of 3D Microstructures: Technology Development and Application
نویسندگان
چکیده
This paper presents the development and application of a 3D microstructure assembly process Plastic Deformation Magnetic Assembly (PDMA). In PDMA, certain part of a microstructure is plastically deformed by the magnetic force generated in a magnetic material piece attached to the microstructure when an external magnetic field is applied. Due to this plastic deformation, the entire microstructure will remain by itself at a rest angle off substrate surface. The amount of plastic deformation and the rest angle are found to be strongly dependent on the deformation region and also the magnetic material piece. A general design rule for PDMA is given. PDMA has been successfully applied to fabricate several novel micromachined devices with high yield and good controllability. As an example, the results of a vertical planar spiral inductor realized by PDMA are also presented in this paper.
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